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Sensors for displacement, distance & position Micro-Epsilon

Micro-Epsilon
Eddy current sensors

Capacitive sensors
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Inductive eddy current sensor eddyNCDT 3001

Inductive eddy current sensor
eddyNCDT 3001

Made in Germany

eddyNCDT 3001 is a new, efficient, inductive displacement sensor based on eddy currents whose compact dimensions have to date only been reserved for inductive proximity switches. The temperature-compensated design provides high stability even in fluctuating ambient temperatures. The eddyNCDT 3001 comes with integrated electronics, offering an outstanding price/performance ratio and easy operation.

  • Measuring range 2/4/6/8 mm
  • Resolution max. 4 µm
  • High frequency response
  • Temperature compensation up to 70°C
  • Robust design to IP67
  • Alternative to inductive switches

The inductive eddyNCDT 3001 displacement sensor is ideally suited to OEM integration and machine building applications. The sensor is based on the eddy current pricniple and factory-calibrated for either ferromagnetic or non-ferromagnetic materials, which eliminates the need for field calibration of the sensor. The eddyNCDT 3001 is available with connector or with integrated cable. A robust design combined with the eddy current measuring principle enables measurements in harsh industrial environments (oil, pressure, dirt). In addition, the eddyNCDT 3001 is suitable for offshore/marine applications (salt water).

DT3001-U2-A-SA DT3001-U2-M-SA
DT3001-U4-A-SA DT3001-U4-M-SA
DT3001-U4-A-Cx DT3001-U4-M-Cx
DT3001-U6-A-SA DT3001-U6-M-SA
DT3001-U8-A-SA DT3001-U8-M-SA

Inductive eddy current sensor eddyNCDT 3005

Inductive eddy current sensor
eddyNCDT 3005

Made in Germany

The eddyNCDT 3005 is a compact, high-power inductive measuring system (eddy current) for high speed and precision displacement and position measurements. The system comprises a robust controller, a sensor and an integrated cable and is factory-calibrated either for ferromagnetic or non-ferromagnetic materials.

  • Ideal for integration into plant and machinery
  • Robust and compact design to IP67
  • High pressure resistance
  • Active temperature compensation up to +180°C
  • Measuring range 1 / 2 / 3 / 6 mm
  • Resolution max. 0.5 µm
  • High frequency response

The eddyNCDT 3005 provides ease of use and high measurement accuracy, offering an outstanding price/performance ratio. The sensor is therefore ideal for OEM integration and machine building applications, particularly where pressure, dirt, oil and high temperatures are present. Where high volume orders are required, customer-specific designs can be tailored to suit individual requirements.

DT3005-U1-A-C1 DT3005-U1-M-C1
DT3005-S2-A-C1 DT3005-S2-M-C1
DT3005-U3-A-C1 DT3005-U3-M-C1
DT3005-U6-A-C1 DT3005-U6-M-C1

Inductive eddy current measuring systemeddyNCDT 3060eddyNCDT 3070

Inductive
eddy current measuring system
eddyNCDT 3060
eddyNCDT 3070

Made in Germany

Non-contact, inductive displacement sensors from Micro-Epsilon operate according to the eddy current measuring principle. Unlike conventional, inductive displacement sensors, they measure on ferromagnetic and non-ferromagnetic materials providing high accuracy, frequency response and temperature stability. Due to their immunity to oil, dirt, pressure and temperature, these inductive eddy current sensors are primarily used for integration in machines and facilities.

  • Ideal for integration into plant and machinery
  • Easy integration with modern fieldbus connection and smart signal processing
  • Combination of resolution, linearity and temperature stability sets new standards
  • Wide range of applications with numerous sensor models
  • Maximum ease of use and intuitive configuration via web interface

The new, powerful & inductive eddyNCDT 3060/3070 measuring systems are ideal for fast and precise displacement measurements. Equipped with a compact controller, a sensor and an integrated cable, these systems are factory-calibrated either for ferromagnetic or non-ferromagnetic materials. With numerous sensor models, high speed and smart signal processing, they define a new performance class in inductive displacement measurement.

DT3060 DT3061
DT3070 DT3071
ES-U1 ES-S2
ES-U3 ES-S4

Inductive powereddy current measuring systemeddyNCDT 3300

Inductive power
eddy current measuring system
eddyNCDT 3300

Made in Germany

Non-contact eddyNCDT 3300 eddy current displacement sensors are designed for use in factory automation, for machine monitoring, for quality control and quality assurance. More than 80 differentes sensors models are available.

  • Measuring ranges (mm): 0.4/0.5/0.8/1/2/3/4/6/8/15/22/40/80
  • Resolution max. 0.02 µm
  • Linearity max. 0.8 µm
  • Multifunction controller with Graphic Display
  • Robust sensors to IP67
  • Up to 3 configurations can be stored
  • Frequency response up to 100 kHz
  • Voltage / current output
  • Suitable sensors for practically any application

The eddyNCDT 3300 controllers are equipped with high performance processors for signal processing and further processing. Three-point linearization enables almost fully automatic linearization, which provides high accuracies for any metallic target and installation environment. With a frequency response of up to 100kHz (-3dB), the eddyNCDT 3300 is suitable for high speed processes. The high resolution enables reliable detection of very small changes in displacement and distance in the sub-micrometre range.

DT3300 DT3301 ES04
EU05 ES08 ES1
EU1 ES2 EU3
ES4 EU6 EU8
EU15 EU22 EU40
EU80 - -

Capacitive sensors capaNCDT

Capacitive sensors capaNCDT

Made in Germany

Capacitive sensors are designed for non-contact measurement of displacement, distance and position, as well as for thickness measurement. Due to their high signal stability and resolution, capacitive displacement sensors are applied in laboratories and industrial measurement tasks. In production control, for example, capacitive sensors measure film thickness and application of the adhesive. Installed in machines, they monitor displacement and tool positions. The special sensor design, triaxial sensor cable and innovative controller technology result in a perfectly matched measurement system. Therefore, capaNCDT measurement systems stand for high precision and signal stability. Even in industrial applications, capacitive sensors achieve resolutions in the submicrometre range.

  • CS005 cylindrical sensor with socket, measuring range: 0.05 mm
  • CS02 cylindrical sensor with socket, measuring range: 0.2 mm
  • CSH02-CAm1,4 cylindrical sensor with cable, measuring range: 0.2 mm
  • CSH02FL-CRm1,4 flat sensor with cable, measuring range: 0.2 mm
  • CS05 cylindrical sensor with socket, measuring range: 0.5 mm
  • CSE05 cylindrical sensor with socket, compact design, measuring range: 0.5 mm
  • CSE05/M8 robust sensor (cylindrical) with M8 thread and socket, measuring range: 0.5 mm
  • CSG0,50-CAm2,0 gap sensor (board design) with cable, 2-sided, measuring range: 0.5 mm
  • CSH05-CAm1,4 cylindrical sensor with cable, measuring range: 0.5 mm
  • CSH05FL-CRm1,4 flat sensor with cable, measuring range: 0.5 mm
  • CS08 cylindrical sensor with socket, measuring range: 0.8 mm
  • CS1 cylindrical sensor with socket, measuring range: 1 mm
  • CS1HP cylindrical sensor with socket, measuring range: 1 mm
  • CSE1 cylindrical sensor with socket, compact design, measuring range: 1 mm
  • CSG1,00-CAm2,0 gap sensor (board design) with cable, 2-sided, measuring range: 1 mm
  • CSH1-CAm1,4 cylindrical sensor with cable, measuring range: 1 mm
  • CSH1FL-CRm1,4 flat sensor with cable, measuring range: 1 mm
  • CSH1,2-CAm1,4 cylindrical sensor with cable, measuring range: 1.2 mm
  • CSH1,2FL-CRm1,4 flat sensor with cable, measuring range: 1.2 mm
  • CSE1,25 cylindrical sensor with socket, compact design, measuring range: 1.25 mm
  • CSE1,25/M12 robust sensor (cylindrical) with M12 thread and socket, measuring range: 1.25 mm
  • CS2 cylindrical sensor with socket, measuring range: 2 mm
  • CSE2 cylindrical sensor with socket, compact design, measuring range: 2 mm
  • CSE2/M16 robust sensor (cylindrical) with M16 thread and socket, measuring range: 2 mm
  • CSF2 gap sensor (board design) with socket, 1-sided, measuring range: 2 mm
  • CSF2-CRg4,0 gap sensor (board design) with cable, 1-sided, measuring range: 2 mm
  • CSH2-CAm1,4 cylindrical sensor with cable, measuring range: 2 mm
  • CSH2FL-CRm1,4 flat sensor with cable, measuring range: 2 mm
  • CS3 cylindrical sensor with socket, compact design, measuring range: 3 mm
  • CSE3 cylindrical sensor with socket, compact design, measuring range: 3 mm
  • CSE3/M24 robust sensor (cylindrical) with M24 thread and socket, measuring range: 3 mm
  • CSH3FL-CRm1,4 flat sensor with cable, measuring range: 3 mm
  • CSF4 gap sensor (board design) with socket, 1-sided, measuring range: 4 mm
  • CSF4-CRg4,0 gap sensor (board design) with cable, 1-sided, measuring range: 4 mm
  • CS5 cylindrical sensor with socket, measuring range: 5 mm
  • CSF6 gap sensor (board design) with socket, 1-sided, measuring range: 6 mm
  • CSF6-CRg4,0 gap sensor (board design) with cable, 1-sided, measuring range: 6 mm
  • CS10 cylindrical sensor with socket, measuring range: 10 mm

Compact capacitive sensor systemcapaNCDT 6110

Compact capacitive sensor system
capaNCDT 6110

Made in Germany

The capaNCDT 6110 is a new, capacitive single-channel displacement measurement system comprising a compact controller, a sensor cable and the sensor. Due to the miniaturized controller and its easy operation, the capaNCDT 6110 is ideally suited to the integration in machines and facilities. The capaNCDT 6110 lends itself well to a wide range of applications and is compatible with all capaNCDT sensors. With a possible power supply of between 9V and 36V, the system can also be used in passenger cars and trucks. The measurement values are output via a voltage output.

  • Measuring ranges (mm): 0.05 / 0.2 / 0.5 / 0.8 / 1 / 2 / 3 / 5 / 10
  • Linearity: max. 0.025 µm
  • Resolution: max. 0.005 µm
  • Analog output (voltage)
  • Digital interface RS485 (controller DT6120)
  • Supply voltage 24 VDC/55 mA (9 - 36 V)

The capacitive DT6110 controller is the entry model for high resolution, capacitive displacement measurement. Due to its extremely compact size, the controller can also be integrated into restricted installation spaces. The DT6110 controller is compatible with all sensors and cables of the capaNCDT series. The DT6110/ECL2 controller provides an extended cable length.

DT6110 DT6110/ECL2 DT6112

Compact capacitive sensor systemcapaNCDT DT61x0/IP

Compact capacitive sensor system
capaNCDT DT61x0/IP

Made in Germany

The capaNCDT DT61x0/IP is an industrial-grade, capacitive sensor system for displacement, distance and position measurements. Consisting of a sensor, a sensor cable and a controller, the measuring system is ready for use without any on-site calibration. Due to its very good temperature stability, immunity to magnetic fields and robust design that is protected to IP68, the capaNCDT DT61x0/IP is used for industrial measurement tasks such as air gap measurement in generators and regulation of plant and machinery.

  • Measuring ranges (mm): 0.5 / 1 / 1.25 / 2 / 3 / 4 / 6
  • Linearity: max. 1 µm
  • Resolution: max. 0.05 µm
  • Analog output (voltage)
  • Digital RS485 interface (DT6120/IP)
  • Supply voltage 24 VDC/55 mA (9 - 36 V)

Protected to IP68, the DT6110/IP capacitive controller is designed for measurement tasks in industrial environments. The DT6110/IP controller is available with either a voltage or current output, and can also be used in confined spaces due to its compact design.

DT6110/IP/U DT6120/IP/U DT6110/IP/I DT6120/IP/I
CSE05 CSE1 CSE1.25 CSE2
CSE3 CSE05/M8 CSE1.25/M12 CSE2/M16
CSE3/M24 CSF2 CSF4 CSF6
CSF2-CRg4.0 CSF4-CRg4.0 CSF6-CRg4.0 -

Multi-channel capacitive measurement systemcapaNCDT 6200

Multi-channel capacitive measurement system
capaNCDT 6200

Made in Germany

The capaNCDT 6200 is the first multi-channel measurement system that is entirely modular. The controller can easily be extended up to four synchronized channels to support flexible applications. All capacitive displacement sensors by Micro-Epsilon can be operated using the capaNCDT 6200 controller. The integrated Ethernet interface supports parameterization and measurements via web interface. The DL6230 demodulator is available for high resolution measurements. For high-speed measurements up to 20kHz, the capaNCDT 6222 system is available.

  • Measuring ranges (mm): 0.05 / 0.2 / 0.5 / 0.8 / 1 / 2 / 3 / 5 / 10
  • Linearity: max. 0.01 µm
  • Resolution: max. 0.2 nm
  • Analog output (voltage)
  • Digital interface Ethernet/EtherCAT interface
  • Modular – expandable up to 4 channels

The measurement system consists of one controller and the respective demodulator for the sensor. A modular design enables the system to be expanded at any time by up to four measuring channels. Therefore, an additional demodulator is integrated. The compact controller can be used as a benchtop unit, wall-mounted or DIN rail-mounted via an adapter. The capaNCDT 6200 is compatible with all sensor models from Micro-Epsilon. Due to a user-friendly web interface, the entire configuration process of the controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other parameters.

DT6200 DT6220 DT6230 DL6220
DL6230 DL6222 DL6222/ECL2

Multi-channel capacitive measurement systemcapaNCDT 6500

Multi-channel capacitive measurement system
capaNCDT 6500

Made in Germany

Capacitive displacement sensors are designed for measurement tasks that require extremely high precision. The capaNCDT 6500 capacitive multi-channel system is ideally suited to reliable measurements down to sub-nanometre resolution. The controller offers a maximum response rate of 7.8kHz (digital, with up to four channels) or a frequency response of 8.5kHz. As well as an analog output, an EtherCAT(R) interface is also available. EtherCAT enables accurate data transmission in real time, with high speed integration into the existing measurement environment and synchronization of two systems. Set up and configuration of the capaNCDT 6500 system are carried out easily using a web browser.

  • Measuring ranges (mm): 0.05 / 0.2 / 0.5 / 0.8 / 1 / 2 / 3 / 5 / 10
  • Linearity: max. 0.01 µm
  • Resolution: max. 0.0375 nm
  • Analog output (voltage)
  • Digital interface Ethernet/EtherCAT interface
  • Modular – expandable up to 8 channels

The capaNCDT 6500 system is designed for measurements tasks that require sub-nanometre resolution. Its strengths are demonstrated particularly well in positioning tasks in the semiconductor industry and laboratory applications. Up to eight sensors can be connected via a preamplifier to the signal conditioning electronics. Due to a user-friendly web interface, the entire configuration process of controller and sensors is carried out without using any additional software. The web interface can be accessed via Ethernet and provides set up and configuration options for filters, arithmetic links and other useful parameters such as triggering, measurement value storage and linearization.

DT6530 DT6510 CPM6011
DT6530C CP6001 DL6530
KSS6420 KSS6430 KSH5
KSH10 CSH1,4FL-CRg6,0 CSH1,4CH-CRg6,0
6610158.01 6610158.02 MD6-22
CSF2-CRg4.0 CSF4-CRg4.0 CSF6-CRg4.0
CSG0,5-CAm2,0 CSG1,0-CAm2,0

One-sided thickness measurement of plasticcombiSENSOR

One-sided thickness measurement of plastic
combiSENSOR

Made in Germany

In its sensor housing, the combiSENSOR combines two displacement sensors. This unique sensor concept enables one-sided thickness measurement of electrically non-conductive materials on metallic objects. Its field of application is the thickness measurement of plastic film or of plastic coating on metal plates. The eddy current sensor penetrates the plastic layer and measures the distance to a metallic material underneath it, e.g. a metal plate. The capacitive sensor synchronously detects the distance to the plastic material. The thickness is determined based on the difference of both sensor signals. The combiSENSOR is connected to the controller via a cable. Operation takes place via a user-friendly web interface for sensor and controller configuration. In addition, the controller offers different calculation functions for both sensor signals.

  • One-side thickness measurement of plastic films and coated metals
  • Target thickness: 40 μm to max. 6 mm
  • Integrated temperature measurement for output of sensor temperature
  • Temperature range sensor -10°C … +85°C
  • High accuracy
  • Ease of use via web interface
  • Integrated function to determine the permittivity
  • Analog interfaces, Ethernet, EtherCAT

Calculation of the two sensor signals provides compensation of mechanical changes such as thermal expansion, deflections or eccentricity in the measurement device. Due to the redundancy of this combined sensor principle, the measured thickness value remains unaffected by any changes in the measurement setup. Due to the high temperature stability, the combiSENSOR provides high measurement accuracy even with fluctuating temperatures. Fields of application are non-contact thickness measurement of plastic films, coated metals, the applied adhesive


Robust multi-channel sensor for multi-track measurementscapaNCDT DTV

Robust multi-channel sensor for multi-track measurements
capaNCDT DTV

Made in Germany

The capaNCDT DTV series is designed for non-contact detection of Disc Thickness Variation (DTV) including capacitive sensors for multi-track measurements and a case with the measurement channel for mobile use. With the capaNCDT DTV measurement system, capacitive displacement sensors determine the thickness of the brake discs from both sides using the difference principle. While the brake disc rotates, the thickness deviation is determined via the circumference of the entire disc. Using several sensors in pairs or the CSH1,4FL multi-channel sensor enables multi-track thickness measurements. Thickness measurements can be carried out in test benches, in road tests or in car repair shops. The DTV case is intended for mobile use, e.g. for quality assurance purposes and warranty claims.

  • Non-contact DTV measurement
  • Multi-track thickness measurements
  • Dynamic measurement up to 20kHz
  • Robust sensor design for long-life operation
  • Comprehensive software
  • Real-time evaluation of the measured results
  • Ease of use via web interface
  • Analog interfaces, Ethernet, EtherCAT

The innovative CSH1, 4FL multi-track sensor contains four capacitive sensors in one compact housing. This is how four tracks on the brake disc can be detected synchronously. Mirror-inverted sensor models mounted on the opposite sides of the brake disc enable accurate thickness measurement. A special ceramic substrate protects the sensors from mechanical and thermal loads, also providing high temperature stability, which enables precise measurement results in the case of fluctuating ambient temperatures. Combined with the DT6220 controller, four sensor channels can be configured and processed synchronously. Due to the high bandwidth, dynamic measurements up to 5kHz (-3dB) are possible. Data output is via an analog output or a digital Ethernet/EtherCAT interface. An intuitive web interface enables fast, easy set up and configuration of the sensor and controller.


Robust measuring system for mobile gap measurementscapaNCDT MD6-22

Robust measuring system for mobile gap measurements
capaNCDT MD6-22

Made in Germany

The capaNCDT MD6-22 capacitive dual-channel handheld gauge is used for mobile and precise measurement of gaps. This measuring device impresses with high accuracy, intuitive operation and long battery life. Thanks to preset measurement modes, the handheld gauge is immediately ready for use. Compatible with all capacitive sensors from Micro-Epsilon, the MD6-22 is used in different measurement tasks, e.g. for rotor gap monitoring in wind turbines and alignment of rollers in plant and machinery.

  • Measurement channels: 2
  • Resolution 0.02 % FSO
  • Linearity ≤ ± 0.2 % FSO
  • Frequency response 100 Hz
  • Storage of measurement data on SD card
  • Weight 500 g (without magnetic holder)
  • Battery life 5h
  • Touch display
  • Preset measurement modes for fast commissioning

Inserted into the gap, the flat sensors from Micro-Epsilon determine the gap width based on the active measuring area. Gaps up to 12 mm can be detected reliably. Thanks to preset measurement modes, the handheld gauge is immediately ready for use. The capaNCDT MD6-22 can be operated in three different measurement modes. The gap measurement mode (single-sided) allows for one or two single-sided flat sensors to be used in gap measurements. The gap measurement (double-sided) mode enables the operation of the handheld gauge with a double-sided flat sensor. In the raw measurement mode, two distance sensors can be evaluated together.